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reverse osmosis deionized water (RODI) is used to rinse acid off silicon after it undergoes silicon etching. Sample of water is taken and measured by using pH meter. However, pH meter takes a 1-2 minutes to get stable reading and the measurement is not consistent with repetition of the same sample. The only way i can think to check whether the silicon is free of acid is by soaking the material with RODI water and check the pH.

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    $\begingroup$ A pH meter works by having a level of hydrated silica gel on the electrode. An acid used for etching silicon would etch that layer off the probe. $\endgroup$ – MaxW Jul 19 '18 at 12:27

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