I collected solid samples from a plugged tube-side of a heat exchanger. These deposits include compounds such as hexachlorodisilane, hexachlorodisiloxane, pentachlorodisilane, graphite dust and amorphous/polycrystalline silicon dust. In the process of collection, the sample has been exposed to moisture, and hence the disilanes should have hydrolyzed to silica/HCl, siloxanes, etc. and the graphite and silicon should remain unaltered.
How do I go about quantifying each component? I am expecting this will be a multi-step analysis with separation/extraction followed by a combination of analytical techniques.